SEMI AUX1- 0699

List of Vendor Identification Codes

SEMI C1.21- 92

Standard for Xylenes

SEMI C10- 0299

Guide for Determination of Method Detection Limits

SEMI C13- 95

Test Method for Particle Shedding and Penetration Performance of Point- of-Use Gas Filters

SEMI C14- 95

Test Method for Particle Shedding Performance of 25 cm Gas Filter Cartridges

SEMI C15- 95

Test Method for PPM and PPB Humidity Standards

SEMI C16- 0299

Guide for Precision and Data Reporting Practices

SEMI C18- 0699

Specification for Acetic Acid

SEMI C19- 0699

Specification for Acetone

SEMI C1- 95

Specifications for Reagents

SEMI C20- 0699

Specification and Guidelines for Ammonium Fluoride 40%

SEMI C21- 0699

Specifications and Guideline for Ammonium Hydroxide

SEMI C22- 0699

Guideline for Boron Tribromide

SEMI C23- 0699

Specifications for Buffered Oxide Etchants

SEMI C24- 0699

Specification for n-Butyl Acetate

SEMI C25- 0699

Specification for Dichloromethane (Methylene Chloride)

SEMI C26- 0699

Specification and Guideline for Hexamethyldisilazane (HMDS)

SEMI C27- 0699

Specifications and Guidelines for Hydrochloric Acid

SEMI C28- 0699

Specifications and Guidelines for Hydrofluoric Acid

SEMI C29- 0699

Specifications and Guidelines for 4.9% Hydrofluoric Acid (10:1 v/v)

SEMI C2- 95

Specifications for Etchants

SEMI C3.10- 95

Standard for Silane (SiH4) (Provisional)

SEMI C3.11- 93

Standard for Silicon Tetrachloride (SiCl4) in Cylinders (Provisional)

SEMI C3.12- 94

Standard for Ammonia (NH3) in Cylinders, 99.998% Quality

SEMI C3.13- 93

Standard for Nitrous Oxide (N2O) in Cylinders, 99.997% Quality

SEMI C3.14- 94

Standard for Argon (Ar), in Cylinders, 99.998% Quality

SEMI C3.15- 93

Standard for Nitrogen (N2) in Cylinders, 99.9992% Quality

SEMI C3.16- 95

Standard for Oxygen (O2) in Cylinders, 99.50% Assay

SEMI C3.18- 94

Standard for Dichlorosilane (H2SiCl2) in Cylinders, 97% Quality

SEMI C3.1- 93

Standard for Argon (Ar), Bulk Liquid, 99.998% Quality

SEMI C3.19- 93

Standard for Hydrogen (H2) in Cylinders, 99.9995% Quality

SEMI C3.20- 92

Standard for Helium (He) in Cylinders, 99.9995% Quality

SEMI C3.21- 90

Standard for Carbon Tetrafluoride (CF4) in Cylinders (Provisional)

SEMI C3.22- 93

Standard for Oxygen (O2), Bulk Liquid, 99.5% Quality

SEMI C3.23- 95

Standard for Oxygen (O2) in Cylinders, 99.98% Quality

SEMI C3.24- 95

Standard for Sulfur Hexafluoride (SF6) in Cylinders, 99.97% Quality

SEMI C3.26- 94

Standard for Tungsten Hexafluoride (WF6) in Cylinders, 99.8% Quality

SEMI C3.27- 94

Standard for Boron Trifluoride (BF3) in Cylinders, 99.0% Quality

SEMI C3.28- 92

Standard for Nitrogen (N2), VLSI Grade in Cylinders

SEMI C3.2- 92

Standard for Arsine (AsH3) in Cylinders

SEMI C3.29- 96

Standard for Nitrogen (N2), Bulk Gaseous, 99.9995% Quality

SEMI C3.30- 96

Standard for Hydrogen (H2), Bulk, 99.9997% Quality

SEMI C3.31- 94

Standard for Dichlorosilane (H2SiCl2) in Cylinders, 99% Quality (Provisional)

SEMI C3.32- 95

Standard for Chlorine (Cl2), 99.996% Quality

SEMI C3.33- 92

Standard for Boron Trichloride (BCI3) (Provisional)

SEMI C3.34- 92

Standard for Disilane (Si2H6)

SEMI C3.35- 95

Standard for Hydrogen Chloride (HCl), 99.997% Quality (Provisional)

SEMI C3.36- 94

Standard for Hydrogen Chloride (HCl), 99.994% Quality (Provisional)

SEMI C3.37- 93

Standard for Hexafluoroethane (C2F6), 99.97% Quality

SEMI C3.38- 89

Standard for Tungsten Hexafluoride (WF6), VLSI Grade (Provisional)

SEMI C3.39- 91

Standard for Nitrogen Trifluoride (NF3) (Provisional)

SEMI C3.40- 92

Standard for Carbon Tetrafluoride (CF4), VLSI Grade (Provisional)

SEMI C3.41- 0697

Standard for Oxygen (O2), Bulk, 99.9998% Quality (Provisional)

SEMI C3.42- 90

Standard for Argon (Ar), VLSI Grade Bulk (Provisional)

SEMI C3.43- 90

Standard for Hydrogen Fluoride (HF), Anhydrous (Provisional)

SEMI C3.44- 91

Standard for Diborane (B2H6) (Provisional)

SEMI C3.45- 92

Standard for Hexafluoroethane (C2F6), 99.996% Quality (Provisional)

SEMI C3.46- 93

Standard for Argon (Ar), Bulk Liquid, 99.9992% Quality

SEMI C3.47- 95

Standard for Hydrogen Bromide (HBr), 99.98% Quality

SEMI C3.48- 93

Standard for Nitrogen (N2), Bulk Liquid, 99.9994% Quality

SEMI C3.4- 93

Standard for Hydrogen (H2), Bulk Liquid, 99.9995% Quality

SEMI C3.49- 94

Standard for Bulk Nitrogen (N2), 99.99999% Quality

SEMI C3.50- 95

Standard for Nitrous Oxide (N2O), 99.9994% Quality (Provisional)

SEMI C3.51- 95

Standard for Boron Trichloride (BCl3), 99.98% Quality

SEMI C3.52- 95

Standard for Tungsten Hexafluoride, 99.996% Quality

SEMI C3.53- 95

Standard for Trifluoromethane (CHF3), 99.95% Quality

SEMI C3.54- 0697

Gas Purity Guideline for Silane (SiH4)

SEMI C3.5- 93

Standard for Nitrogen (N2), Bulk Liquid, 99.998% Quality

SEMI C3.6- 95

Standard for Phosphine (PH3) in Cylinders, 99.98% Quality (Provisional)

SEMI C30- 0699

Specifications and Guidelines for Hydrogen Peroxide

SEMI C3- 0699

Specifications for Gases

SEMI C31- 0699

Specification for Methanol

SEMI C32- 0699

Specification for Methyl Ethyl Ketone

SEMI C33- 0699

Specifications for n-Methyl 2-Pyrrolidone

SEMI C34- 0699

Specification and Guideline for Mixed Acid Etchants

SEMI C35- 0699

Specifications and Guideline for Nitric Acid

SEMI C36- 0699

Specifications and Guidelines for Phosphoric Acid

SEMI C37- 0699

Specification for Phosphoric Etchants

SEMI C38- 0699

Guideline for Phosphorus Oxychloride

SEMI C39- 0699

Specification for Potassium Hydroxide Pellets

SEMI C40- 0699

Specification for Potassium Hydroxide, 45% Solution

SEMI C41- 0699

Specifications and Guidelines for 2-Propanol

SEMI C42- 0699

Specification for Sodium Hydroxide Pellets

SEMI C43- 0699

Specification for Sodium Hydroxide, 50% Solution

SEMI C44- 0699

Specifications and Guidelines for Sulfuric Acid

SEMI C45- 0699

Specification and Guideline for Tetraethylorhosilicate (TEOS)

SEMI C46- 0699

Guideline for 25% Tetramethylammonium Hydroxide

SEMI C47- 0699

Guideline for Trans 1,2 Dichloroethylene

SEMI C48- 0699

Specification and Guideline for 1,1,1-Trichloroethane, Furnace Grade

SEMI C49- 0699

Guideline for Trimethylborate

SEMI C50- 0699

Guideline for Trimethylphosphite

SEMI C51- 0699

Specification for Xylenes

SEMI C6.2- 93

Particle Specification for Grade 20/0.02 Oxygen Delivered as Pipeline Gas

SEMI C6.3- 89

Particle Specification for Grade 20/0.2 Hydrogen (H2) Delivered as Pipeline Gas

SEMI C6.4- 90

Particle Specification for Grade 20/0.02 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas

SEMI C6.5- 90

Particle Specification for Grade 10/0.2 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas

SEMI C6.6- 90

Particle Specification for Grade 10/0.1 Nitrogen (N2) and Argon (AR) Delivered as Pipeline Gas

SEMI C6.7- 93

Particle Specification for Grade 10/0.2 Nitrogen in High Pressure Gas Cylinders

SEMI C9.1- 93

Guide for Analysis of Uncertainties in Gravimetrically Prepared Gas Mixtures

SEMI COMM

Committee Descriptions and Current Development Activity; Regional Standards Committee Lists

SEMI COPY

SEMI Copyright Information

SEMI D10- 95

Test Method for Chemical Durability of Flat Panel Display Glass Substrates

SEMI D11- 95

Specification for Flat Panel Display Glass Substrate Cassettes

SEMI D12- 95

Specification for Edge Condition of Flat Panel Display (FPD) Substrates

SEMI D13- 95

Terms and Definitions for FPD Color Filter Assemblies

SEMI D14- 96

Specification for Image Field Stitching Capabilities of FPD Steppers

SEMI D15- 1296

FPD Glass Substrate Surface Waviness Measurement Method

SEMI D16- 0998

Specification for Mechanical Interface Between Flat Panel Display Material Handling System and Tool Port

SEMI D17- 0998

Mechanical Specification for Cassettes Used to Ship Flat Panel Display Glass Substrates

SEMI D18- 0299

Specification for Cassettes Used for Horizontal Transport and Storage of Flat Panel Display Substrates

SEMI D19- 0299

Test Method for the Determination of Chemical Resistance of Flat Panel Display Color Filters

SEMI D3- 91

Quality Area Specification for Flat Panel Display Substrates

SEMI D4- 94

Method for Referencing Flat Panel Display Substrates

SEMI D5- 94

Standard Size for Flat Panel Display Substrates

SEMI D6- 0699

Specification for Edge Length and Thickness for Flat Panel Display Mask Substrates

SEMI D7- 94

FPD Glass Substrate Surface Roughness Measurement Method

SEMI D8- 94

Specification for Overlay Capabilities of FPD Steppers

SEMI D9- 94

Definitions for Flat Panel Display Substrates

SEMI DEF MASKS

Definitions for Flat Panel Display Masks

SEMI DEFECT TERM

Defect Terminology for FPD Masks

SEMI E/H- 0699

Equipment Automation/Hardware Volume

SEMI E/S 1- 0699

Equipment Automation/Software Volume 1

SEMI E/S 2- 0699

Equipment Automation/Software Volume 2

SEMI E1.1- 0697

Standard for 3 Inch Plastic and Metal Wafer Carriers, General Usage

SEMI E1.2- 0697

Standard for 100 mm Plastic and Metal Wafer Carriers, General Usage

SEMI E1.3- 0697

Standard for 125 mm Plastic and Metal Wafer Carriers, General Usage

SEMI E1.4- 0697

Standard for 125 mm Plastic and Metal Wafer Carriers, Auto Transport Usage

SEMI E1.5- 91

Standard for 150 mm Plastic and Metal Wafer Carriers, General Usage

SEMI E1.9- 0699

Provisional Mechanical Specification for Cassettes Used to Transport and Store 300-mm Wafers

SEMI E10- 0699

Standard for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM)

SEMI E1- 0697

Specification for 3 Inch, 100 mm, 125 mm, and 150 mm Plastic and Metal Wafer Carriers

SEMI E11- 0697

Guideline for 125 mm, 150 mm, and 200 mm Plastic and Metal Wafer Carrier Application

SEMI E12- 96

Standard for Standard Pressure, Temperature, Density, and Flow Units Used in Mass Flow Meters and Mass Flow Controllers

SEMI E13- 91

Standard for SEMI Equipment Communication Standard Message Service (SMS)-NOTE: This document was balloted and approved for withdrawal in 1995

SEMI E14- 93

Measurement of Particle Contamination Contributed to the Product from the Process or Support Tool

SEMI E15.1- 0699

Provisional Specification for 300 mm Tool Load Port

SEMI E15- 0698

Specification for Tool Load Port

SEMI E16- 90

Guideline for Determining and Describing Mass Flow Controller Leak Rates

SEMI E17- 91

Guideline for Mass Flow Controller Transient Characteristics Tests

SEMI E18- 91

Guideline for Temperature Specifications of the Mass Flow Controller

SEMI E19.1- 0697

Port Standard for Mechanical Interface of Wafer Cassette Transfer, 100 mm (4 Inch) Port

SEMI E19.2- 0697

Port Standard for Mechanical Interface of Wafer Cassette Transfer, 125 mm (5 Inch) Port

SEMI E19.3- 0697

Port Standard for Mechanical Interface of Wafer Cassette Transfer, 150 mm (6 Inch) Port

SEMI E19.4- 0998

200 mm Standard Mechanical Interface (SMIF)

SEMI E19.5- 0996

Specification for 300 mm Bottom-Opening Standard Mechanical Interface (SMIF)

SEMI E19- 0697

Standard Mechanical Interface (SMIF)

SEMI E2.2- 93

Standard for 200 mm Quartz and High Temperature Wafer Carriers

SEMI E2.3- 93

Standard for 100 mm Quartz and High Temperature Wafer Carriers

SEMI E2.4- 93

Standard for 125 mm Quartz and High Temperature Wafer Carriers

SEMI E2.5- 93

Standard for 150 mm Quartz and High Temperature Wafer Carriers

SEMI E20- 0697

Cluster Tool Module Interface: Electrical Power and Emergency Off Standard

SEMI E21.1- 1296

Cluster Tool Module Interface 300 mm: Mechanical Interface and Wafer Transport Standard

SEMI E21- 94

Cluster Tool Module Interface: Mechanical Interface and Wafer Transport Standard

SEMI E22.1- 1296

Cluster Tool Module Interface 300 mm: Transport Module End Effector Exclusion Volume Standard

SEMI E22- 0697

Cluster Tool Module Interface: Transport Module End Effector Exclusion Volume Standard

SEMI E23- 96

Specification for Cassette Transfer Parallel I/O Interface

SEMI E24- 92

Cluster Tool Module Interface: Isolation Valve Interlocks Standard

SEMI E25- 92

Cluster Tool Module Interface: Module Access Guideline

SEMI E26.1- 92

Radial Cluster Tool Footprint 300 mm Standard

SEMI E26- 92

Radial Cluster Tool Footprint Standard

SEMI E27- 92

Standard for Mass Flow Controller and Mass Flow Meter Linearity

SEMI E28- 92

Guideline for Pressure Specifications of the Mass Flow Controller

SEMI E2- 93

Specifications for Quartz and High Temperature Wafer Carriers

SEMI E29- 93

Standard Terminology for the Calibration of Mass Flow Controllers and Mass Flow Meters

SEMI E30.1- 0698

Inspection and Review Specific Equipment Model (ISEM)

SEMI E30.2- 0698

Handler Equipment Specific Equipment Model (HSEM)

SEMI E30.3- 0698

Testing Equipment Specific Equipment Model (TSEM)

SEMI E30.4- 0699

Intrabay AMHS SEM Specification (IBSEM)

SEMI E30- 0299

Generic Model for Communications and Control of SEMI Equipment (GEM)

SEMI E31- 93

Specification for Electrical Interface, Japan Only

SEMI E32.1- 0997

SECS-II Support for Material Movement

SEMI E32- 0997

Material Movement Management (MMM)

SEMI E33- 94

Specification for Semiconductor Manufacturing Facility Electromagnetic Compatibility

SEMI E34- 95

Guideline for Mass Flow Device Return

SEMI E35.1- 95

Guide for Cost of Equipment Ownership Comparison Metric

SEMI E35- 0299

Cost of Ownership for Semiconductor Manufacturing Equipment Metrics

SEMI E36- 0699

Semiconductor Equipment Manufacturing Information Tagging Specification

SEMI E37.1- 96

High-Speed SECS Message Services Single-Session Mode (HSMS- SS)

SEMI E37.2- 95

High-Speed SECS Message Services General Session (HSMS- GS)

SEMI E37- 0298

High-Speed SECS Message Services (HSMS) Generic Services

SEMI E38.1- 95

Communications Environment HSMS/SECS-II for Cluster Tool Module Communications

SEMI E38- 1296

Cluster Tool Module Communications (CTMC)

SEMI E39.1- 1296

SECS-II Protocol for Object Services Standard (OSS)

SEMI E39- 0697

Object Services Standard: Concepts, Behavior, and Services

SEMI E40.1- 0996

SECS-II Support for Processing Management Standard

SEMI E4- 0699

SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)

SEMI E40- 96

Standard for Processing Management

SEMI E41.1- 0996

SECS-II Support for the Exception Management Standard

SEMI E41- 95

Exception Management (EM) Standard

SEMI E42.1- 0997

Standard for SECS-II Protocol for Recipe Management Standard (RMS)

SEMI E42- 0299

Recipe Management Standard: Concepts, Behavior, and Message Services

SEMI E43- 95

Recommended Practice for Measuring Static Charge on Objects and Surfaces

SEMI E44- 96

Guide for Procurement and Acceptance of Minienvironments

SEMI E45- 95

Test Method for the Determination of Inorganic Contamination from Minienvironments

SEMI E46- 95

Test Method for the Determination of Organic Contamination from Minienvironments

SEMI E47.1- 0699

Provisional Mechanical Specification for Boxes and Pods Used to Transport and Store 300-mm Wafers

SEMI E47- 95

Specification for 150 mm/200 mm Pod Handles

SEMI E48- 95

Specification for SMIF Indexer Volume Requirement

SEMI E49.1- 95

Guide for Tool Final Assembly, Packaging, and Delivery

SEMI E49.2- 0298

Guide for High Purity Deionized Water and Chemical Distribution Systems in Semiconductor Manufacturing Equipment

SEMI E49.3- 0298

Guide for Ultrahigh Purity Deionized Water and Chemical Distribution Systems in Semiconductor Manufacturing Equipment

SEMI E49.4- 0298

Guide for High Purity Solvent Distribution Systems in Semiconductor Manufacturing Equipment

SEMI E49.5- 0298

Guide for Ultrahigh Purity Solvent Distribution Systems in Semiconductor Manufacturing Equipment

SEMI E49.6- 95

Guide for Subsystem Assembly and Testing Procedures - Stainless Steel Systems

SEMI E49.7- 95

Guide for Subsystem Assembly and Testing Procedures - Polymer Systems

SEMI E49.8- 0298

Guide for High Purity Gas Distribution Systems in Semiconductor Manufacturing Equipment

SEMI E49.9- 0298

Guide for Ultrahigh Purity Gas Distribution Systems in Semiconductor Manufacturing Equipment

SEMI E49- 95

Guide for Standard Performance, Practices, and Sub-Assembly for High Purity Piping Systems and Final Assembly for Semiconductor Manufacturing Equipment

SEMI E5- 0699

SEMI Equipment Communications Standard 2 Message Content (SECS-II)

SEMI E50- 95

Integrated SMIF Indexer Application Model for the Sensor/Actuator Network

SEMI E51- 0298

Guide for Typical Facilities Services and Termination Matrix

SEMI E52- 0298

Practice for Referencing Gases Used in Digital Mass Flow Controllers

SEMI E53.1- 1296

SECS-II Support for Event Reporting Standard

SEMI E53- 1296

Event Reporting

SEMI E54.1- 0299

Standard for Sensor/Actuator Network Common Device Model

SEMI E54.2- 0698

Guide for Writing Sensor/Actuator Network (SAN) Standard Ballots

SEMI E54.3- 0698

Specification for Sensor/Actuator Network Specific Device Model for Mass Flow Device

SEMI E54.4- 0997

Standard for Sensor/Actuator Network Communications for Devicenet- Previously Designated as SEMI E59: 0697

SEMI E54.5- 0997

Standard for Sensor/Actuator Network Communications for the Smart Distributed System (SDS)-Previously Designated as SEMI E60: 0697

SEMI E54.6- 0997

Standard for Sensor/Actuator Network Communications for Lonworks- Previously Designated as SEMI E61: 0697

SEMI E54.7- 0699

Standard for Sensor/Actuator Network Communication for Seriplex

SEMI E54- 0997

Sensor/Actuator Network Standard

SEMI E56- 1296

Test Method for Determining Accuracy, Linearity, Repeatability, Short- Term Reproducibility, Hysteresis, and Deadband of Thermal Mass Flow Controllers

SEMI E57- 0299

Provisional Mechanical Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers

SEMI E58.1- 0697

SECS-II Protocol for Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior, and Services

SEMI E58- 0697

Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior, and Services

SEMI E6- 1296

Facilities Interface Specifications Guideline and Format

SEMI E62- 0299

Provisional Specification for 300-mm Front-Opening Interface Mechanical Standard (FIMS)

SEMI E63- 0699

Provisional Mechanical Specification for 300-mm Box Opener/Loader to Tool Standard (Bolts-M) Interface

SEMI E64- 0698

Provisional Specification for 300 mm Cart to SEMI E15.1 Docking Interface Port

SEMI E66- 0997

Test Method for Determining Particle Contribution by Mass Flow Controllers

SEMI E67- 0997

Test Method for Determining Reliability of Mass Flow Controller

SEMI E68- 0997

Test Method for Determining Warm-Up Time of Mass Flow Controllers

SEMI E69- 0298

Test Method for Determining Reproducibility and Zero Drift for Thermal Mass Flow Controllers

SEMI E70- 0698

Guide for Tool Accommodation Process

SEMI E72- 0699

Provisional Specification and Guide for 300-mm Equipment Footprint, Height, and Weight

SEMI E73- 0299

Specification for Vacuum Pump Interfaces - Dry Pumps

SEMI E74- 0299

Specification for Vacuum Pump Interfaces - Turbomolecular Pumps

SEMI E75- 0698

Provisional Mechanical Specification for Box/Pod Compatible Cassettes Used to Transport and Store 300-mm Wafers

SEMI E76- 0299

Guide for 300-mm Process Equipment Points of Connection to Facility Services

SEMI E77- 0998

Test Method for Calculation of Conversion Factors for a Mass Flow Controller Using Surrogate Gases

SEMI E78- 0998

Electrostatic Compatibility - Guide to Assess and Control Electrostatic Discharge (ESD) and Electrostatic Attraction (ESA) for Equipment

SEMI E79- 0299

Standard for Definition and Measurement of Equipment Productivity

SEMI E7- 91

Specification for Electrical Interfaces for the U.S. Only

SEMI E80- 0299

Test Method for Detremining Attitude Sensitivity of Mass Flow Controllers (Mounting Position)

SEMI E81- 0699

Provisional Specification for CIM Framework Domain Architecture

SEMI E83- 0699

Provisional Specification for 300mm PGV Mechanical Docking Flange

SEMI E84- 0699

Specification for Enhanced Carrier Handoff Parallel I/O Interface

SEMI E85- 0699

Provisional Specification for Physical AMHS Stocker to Interbay Transport System Interoperability

SEMI E8- 92

Specification Wafer Transport Systems: Interface Coordinates

SEMI F- 0699

Facility Standards and Safety Guidelines

SEMI F10- 0698

Test Method to Determine the Internal Pressure Required to Produce a Failure of a Tube Fitting Connection Made of Fluorocarbon Materials

SEMI F11- 0998

Test Method to Obtain an Indication of the Thermal Characteristics of Tube Fitting Connections Made of Fluorocarbon Materials